Equipment

Apparatus used in the MATEIS laboratory

Preparation techniques

Gold, aluminium oxide or and carbon metallisation
Wire sawing
Ultrasonic cutting
Tripod
Electropolishing
Vibratory finishing
Ultramicrotomy at room temperature
PIPS

Optical microscopy

Zeiss AxioPhot - reflection, transmission, polarised light etc.
Scanning electron microscope: Zeiss Supra 55VP equipped with:
In situ decontamination system (Evactron by XEI Scientific)
EDS analysis (X-max SDD 80 mm² by Oxford Instruments)
EBSD (Nordlys camera by Oxford Instruments)
In situ traction board (Gatan)
Transmission electron micrscope : JEOL 200CX equipped with :
Orius camera (Gatan)
Single-tilt, double-tilt, tilt-rotation slide
EDS analysis (xxx by Oxford Instruments)

Apparatus used at the Centre Lyonnais de Microscopie (CLYM)

Environmental scanning electron microscope (FEI ESEM XL-30 FEG)

EDS analysis (X-max 50 mm² by Oxford Instruments)
Peltier board
Heating boards (1000 and 1500°C)
Wet-STEM « home-made » rack
“Home-made” Peltier tomographic rack
Traction board
« Home-made» traction-heating board
Micro-injecter

Transmission electron microscope (JEOL 2010F)

Orius camera (Gatan)
EDS analysis (X-max 80 mm² by Oxford Instruments)
Electron energy loss spectrometer (DigiPEELS de Gatan)
STEM-HAADF modulus
Simple-tilt, double-tilt and cold slide(N2) JEOL, double-tilt GATAN BE analysis, NANOFACTORY nano-indentation, "home-made" connector for single-tilt +/-85° tomography

Environmental scanning electron microscope (FEI Titan ETEM G2 80-300 kV)

Mass spectrometer, plasma cleaner in situ
STEM-HAADF modulus
« Lens » type spherical aberration correction
Standard, tomographic, heating, double-tilt slides

Focused-ion beam (ZEISS NVision40, GEMIN SEM column, SII Ion Beam column)

STEM low-voltage sensor
Manipulator (Klocke)
EBSD : rapid Nordlys 2S camera, Oxford Instruments
EDS : SDD X-max 50 mm², Oxford Instruments
FIBICS : Very high resolution external scanning system (FIB/SEM) for nanopatterning and high resolution 3D
FLOODGUN : load control
GIS : C, W, SiOx, H2O, XeF2
Secondary Ion Detector