Equipment

Apparatus used in the MATEIS laboratory

Preparation techniques

• Gold, aluminium oxide or and carbon metallisation
• Wire sawing
• Ultrasonic cutting
• Tripod
• Electropolishing
• Vibratory finishing
• Ultramicrotomy at room temperature
• PIPS

Optical microscopy

• Zeiss AxioPhot - reflection, transmission, polarised light etc.
• Scanning electron microscope: Zeiss Supra 55VP equipped with:
• In situ decontamination system (Evactron by XEI Scientific)
• EDS analysis (X-max SDD 80 mm² by Oxford Instruments)
• EBSD (Nordlys camera by Oxford Instruments)
• In situ traction board (Gatan)
• Transmission electron micrscope : JEOL 200CX equipped with :
• Orius camera (Gatan)
• Single-tilt, double-tilt, tilt-rotation slide
• EDS analysis (xxx by Oxford Instruments)

Apparatus used at the Centre Lyonnais de Microscopie (CLYM)

Environmental scanning electron microscope (FEI ESEM XL-30 FEG)

• EDS analysis (X-max 50 mm² by Oxford Instruments)
• Peltier board
• Heating boards (1000 and 1500°C)
• Wet-STEM « home-made » rack
• “Home-made” Peltier tomographic rack
• Traction board
• « Home-made» traction-heating board
• Micro-injecter

Transmission electron microscope (JEOL 2010F)

• Orius camera (Gatan)
• EDS analysis (X-max 80 mm² by Oxford Instruments)
• Electron energy loss spectrometer (DigiPEELS de Gatan)
• STEM-HAADF modulus
• Simple-tilt, double-tilt and cold slide(N2) JEOL, double-tilt GATAN BE analysis, NANOFACTORY nano-indentation, "home-made" connector for single-tilt +/-85° tomography

Environmental scanning electron microscope (FEI Titan ETEM G2 80-300 kV)

• Mass spectrometer, plasma cleaner in situ
• STEM-HAADF modulus
• « Lens » type spherical aberration correction
• Standard, tomographic, heating, double-tilt slides

Focused-ion beam (ZEISS NVision40, GEMIN SEM column, SII Ion Beam column)

• STEM low-voltage sensor
• Manipulator (Klocke)
• EBSD : rapid Nordlys 2S camera, Oxford Instruments
• EDS : SDD X-max 50 mm², Oxford Instruments
• FIBICS : Very high resolution external scanning system (FIB/SEM) for nanopatterning and high resolution 3D
• FLOODGUN : load control
• GIS : C, W, SiOx, H2O, XeF2
• Secondary Ion Detector